By Robert A. Dorey
The MEMS (Micro Electro-Mechanical platforms) marketplace lower back to progress in 2010. the whole MEMS industry is worthy approximately $6.5 billion, up greater than eleven percentage from final 12 months and approximately as excessive as its old top in 2007. MEMS units are used throughout sectors as various as automobile, aerospace, scientific, business method regulate, instrumentation and telecommunications – forming the nerve heart of goods together with airbag crash sensors, strain sensors, biosensors and ink jet printer heads. a part of the MEMS cluster in the Micro & Nano applied sciences Series, this booklet covers the fabrication ideas and functions of thick movie piezoelectric micro electromechanical platforms (MEMS). It comprises examples of purposes the place the piezoelectric thick movies were used, illustrating how the fabrication technique pertains to the houses and function of the ensuing machine. different themes comprise: top-down and bottom-up fabrication of thick movie MEMS, integration of thick motion pictures with different fabrics, impact of microstructure on houses, equipment functionality, etc.
- Provides specified assistance at the fabrication strategies and purposes of thick movie MEMS, for engineers and R&D groups
- Written via a unmarried writer, this booklet presents a transparent, coherently written consultant to this significant rising technology
- Covers fabrics, fabrication and functions in a single book
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